Rotary magnetron component "magnet bar"
Optimized cooling concept! Inverted magnetic array is also available.
The "Magnet Bar" is a component for rotary magnetrons that has excellent magnetic field uniformity. The development focuses on target erosion, layer uniformity, process stability, and the strength of the magnetic field according to the application. It also accommodates various end blocks. This product is available in a wide range of magnetic field strengths and lengths. Additionally, inspections are conducted in-house for quality control. 【Features】 ■ Optimization of film uniformity ■ High target utilization efficiency ■ Uniform thin film characteristics across the entire substrate width ■ Reduction of process voltage ■ Maximum process power (limited by target material and bonding) *For more details, please refer to the PDF document or feel free to contact us.
- Company：フォンアルデンヌジャパン
- Price：Other
